Cryopump

Cryopump is a kind of positive displacement vacuum pump

Cryopump (also known as cryogenic pump, cooling pump, condensate pump) is a kind of positive displacement vacuum pump using the principal of cryogenic condensation and cryogenic adsorption for gas suction and it is the equipment to obtain oil-free and high-vacuum environment. Cryopump is used in manufacturing process of semiconductors, integrated circuits, optoelectronic devices, and it is one of the key equipments specially for integrated circuits; cryopump is also used in other kinds of coating equipments and vacuum equipments.

1,Real oil-free cryopump:;2,To obtain and maintain vacuum using cryogenic plate to condensate and adsorb gas, clean and pollution-free;3,Fast Pumping speed: fast pumping speed especially for H2O,H2, etc. Thus the exhaust velocity is faster than that of other cryopumps, which improves the product output greatly;4,Low operating cost: only electricity and cooling water is needed during runtime, while liquid nitrogen and other cryogenic liquids don't be needed, which makes the operation simple and convenient;

Features

1,Strong adaptability;2,There are not moving parts in vacuum chamber, thus the interference from outside or particles from the vacuum system will not affect the work of cryopump;3,Fewer moving parts and low-speed operation make service life longer;4,All types of cryopumps can reach the limit degree of vacuum 10-7 Pa, and some special varieties of cryopumps can achieve 10-9 Pa.

Application

1,Sputter coating2,Evaporation coating 3,Ion implantation 4,Molecular beam epitaxy 5,The industrial vacuum coating6,Electron beam equipment7,Accelerator beam tube8,Surface analysis equipments9,Mass spectrometer10,Other high-vacuum or ultra-high vacuum equipments

Cryopump